Patent · US Active

Micro-mechanical sensor of angular velocity

US8997565B2 · kind B2 · utility

2Cited by

29References

11Claims

0Family size

Assignee

MURATA ELECTRONICS OY · FI

Inventor

Anssi Blomqvist · Helsinki, FI

Key dates

Filing date	Mar 2, 2010
Grant date	Apr 7, 2015
Priority date	—
Expiry date	Mar 3, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/5747
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micro-mechanical resonator is provided. The micro-mechanical resonator comprises two masses coupled in the direction of a common axis by a spring structure. The spring structure comprises a spring that couples at least a first bar connected to the masses and a second bar extending in the motion axis direction, said spring being arranged to bend in a direction perpendicular to the motion direction of the motion axis. A micro-mechanical resonator matrix, a sensor and a navigation device are also provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.