Patent · US Active

Transistor test structure

US9000785B2 · kind B2 · utility

1Cited by

5References

20Claims

0Family size

Assignee

STMicroelectronics SA

Inventors

Clement Charbuillet · Chambéry, FR
Patrick Scheer · Saint-Martin-d'Hères, FR

Key dates

Filing date	Jul 25, 2012
Grant date	Apr 7, 2015
Priority date	—
Expiry date	May 30, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH01L22/34
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A test structure may characterize the properties of a transistor including a DC test structure for testing DC properties of the transistor, and an AC test structure for testing AC properties of the transistor. The DC and AC test structures may have common test pads.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.