Patent · US Active

Microscope and observation method

US9001321B2 · kind B2 · utility

2Cited by
1References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 8, 2011
Grant dateApr 7, 2015
Priority date
Expiry dateNov 2, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B2207/114
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Provided is a microscope and an observation method which can improve spatial resolution. A microscope according to an aspect of the invention includes a laser light source (10), an objective lens (16) that focuses light from the laser light source on a sample, and a detector (22) that detects the laser light as signal light from a sample (17) when the sample (17) is irradiated with the laser light. The light is applied to the sample with an intensity changed to obtain a nonlinear region where intensities of the light and the signal light have a nonlinear relation due to occurrence of saturation or nonlinear increase of the signal light when the light has a maximum intensity, and the detector (22) detects the signal light according to the intensity of the laser light to perform observation based on a saturation component or a nonlinear increase component of the signal light.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.