Methods for fabricating high aspect ratio probes and deforming high aspect ratio nanopillars and micropillars
US9005548B2 · kind B2 · utility
5Cited by
17References
3Claims
0Family size
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Key dates
| Filing date | Feb 24, 2010 |
| Grant date | Apr 14, 2015 |
| Priority date | — |
| Expiry date | Jun 20, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/25375
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods for fabricating of high aspect ratio probes and deforming micropillars and nanopillars are described. Use of polymers in deforming nanopillars and micropillars is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.