Patent · US Active

Package for a micro-electro mechanical device

US9006877B2 · kind B2 · utility

0Cited by
4References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 31, 2008
Grant dateApr 14, 2015
Priority date
Expiry dateJun 4, 2029

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81C1/00269
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A package for a micro-electromechanical device (MEMS package) includes an inner enclosure having an inner cavity defined therein, and a fill port channel communicating with the inner cavity and of sufficient length to allow a quantity of adhesive to enter the fill port channel while preventing the adhesive from entering the inner cavity.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.