Package for a micro-electro mechanical device
US9006877B2 · kind B2 · utility
0Cited by
4References
5Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 31, 2008 |
| Grant date | Apr 14, 2015 |
| Priority date | — |
| Expiry date | Jun 4, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C1/00269
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A package for a micro-electromechanical device (MEMS package) includes an inner enclosure having an inner cavity defined therein, and a fill port channel communicating with the inner cavity and of sufficient length to allow a quantity of adhesive to enter the fill port channel while preventing the adhesive from entering the inner cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.