Multifunction solid-state inspection system
US9007572B2 · kind B2 · utility
1Cited by
30References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 13, 2013 |
| Grant date | Apr 14, 2015 |
| Priority date | — |
| Expiry date | Jun 11, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0016
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection system includes optical components for operating the inspection system in an interference fringe imaging mode and a microscope imaging mode. The inspection system further includes at least one optical light source configured to emit a first wavelength of light to operate the inspection system in the interference fringe imaging mode and configure to emit a second wavelength of light to operate the inspection system in the microscope mode. The first wavelength of light is different from the second wavelength of light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.