Multi-analyzer angle spectroscopic ellipsometry
US9007583B2 · kind B2 · utility
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8References
18Claims
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Key dates
| Filing date | Jul 3, 2012 |
| Grant date | Apr 14, 2015 |
| Priority date | — |
| Expiry date | Nov 16, 2032 |
Classification
- Technology area (CPC —)General
Abstract
Ellipsometry systems and ellipsometry data collection methods with improved stabilities are disclosed. In accordance with the present disclosure, multiple predetermined, discrete analyzer angles are utilized to collect ellipsometry data for a single measurement, and data regression is performed based on the ellipsometry data collected at these predetermined, discrete analyzer angles. Utilizing multiple discrete analyzer angles for a single measurement improves the stability of the ellipsometry system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.