Methods for making a sensitive resonating beam accelerometer
US9009947B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 19, 2012 |
| Grant date | Apr 21, 2015 |
| Priority date | — |
| Expiry date | Apr 19, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4908
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of making a resonating beam accelerometer (RBA). In an example process, a proof mass device and resonators are created from a quartz material. A direct bond is formed between the proof mass and the resonators by applying a predefined amount of pressure at a predefined temperature for a predefined amount of time. One or more damping plates are created from a quartz material. A direct bond is formed between the damping plates and the proof mass device. The proof mass device is created by applying a predefined amount of pressure at pressure at temperature to two bases, two proof mass portions, and a flexure. The proof mass bases are on opposite sides of the flexure. The proof mass portions are on opposite sides of the flexure. A gap is present between the proof mass bases and the proof mass portions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.