MEMS devices sensing both rotation and acceleration
US9010184B2 · kind B2 · utility
21Cited by
31References
15Claims
0Family size
Assignee
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Key dates
| Filing date | May 23, 2011 |
| Grant date | Apr 21, 2015 |
| Priority date | — |
| Expiry date | Oct 5, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS device comprises a proof mass suspended above a substrate, one or more driving combs, and one or more sensing combs. During operation, a DC actuating potential in series with an AC modulation potential is applied to the proof mass, and an AC actuating potential is applied to the one or more driving combs such that the proof mass moves in an oscillatory manner. An inertial sensing system further comprises a sensing element configured to detect a rotation information coupled with an AC signal and an acceleration information coupled with a DC signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.