Three-dimensional micro-electro-mechanical-system sensor
US9010185B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 29, 2012 |
| Grant date | Apr 21, 2015 |
| Priority date | — |
| Expiry date | Aug 2, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0845
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention discloses a three-dimensional micro-electro-mechanical-system sensor. The sensor includes movable first electrodes, plural movable second electrodes, plural fixed third electrodes, and plural fixed fourth electrodes. The first electrodes and their adjacent third electrodes form at least one first capacitor and at least one second capacitor, and the second electrodes and their adjacent fourth electrodes form at least one third capacitor. The capacitance change of the first capacitor reflects the displacement of the proof mass along a first axis, the capacitance change of the second capacitor reflects the displacement of the proof mass along a second axis, and the capacitance change of the third capacitor reflects the displacement of the proof mass along a third axis. The first, second, and third axes define a three-dimensional coordinate system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.