Process for preparing hydridosilanes

US9011812B2 · kind B2 · utility

Assignee

• EVONIK DEGUSSA GMBH · DE

Inventors

• Nicole Brausch · Erlangen, DE
• Jens Haubrock · Schneverdingen, DE
• Udo Knippenberg · Marl, DE
• Thorsten Schwaertzke · Marl, DE
• Joerg Zoellner · Recklinghausen, DE
• Stephan Wieber · Karlsruhe, DE

Key dates

• Filing date: Dec 20, 2011
• Grant date: Apr 21, 2015
• Expiry date: Feb 1, 2032

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C01B33/10773
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

The present invention relates to a process for preparing hydridosilanes from halosilanes, in which a) i) at least one halosilane of the generic formula SinX2n+2 (where n≧3 and X=F, Cl, Br and/or I) and ii) at least one catalyst are converted to form a mixture comprising at least one halosilane of the generic formula SimX2m+2 (where m>n and X=F, Cl, Br and/or I) and SiX4 (where X=F, Cl, Br and/or I), and b) the at least one halosilane of the generic formula SimX2m+2 is hydrogenated to form a hydridosilane of the generic formula SimH2m+2, the hydridosilane of the generic formula SimH2m+2 is separated from partially halogenated hydridosilanes of the general formula SimH(2m+2−y)Xy (where 1<y<2m+1), and the separated partially halogenated hydridosilanes of the general formula SimH(2m+2−y)Xy (where 1<y<2m+1) are hydrogenated again.