Process for forming optically clear conductive metal or metal alloy thin films and films made therefrom
US9012044B2 · kind B2 · utility
12Cited by
41References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 26, 2010 |
| Grant date | Apr 21, 2015 |
| Priority date | — |
| Expiry date | Feb 20, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/562
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A process of forming optically clear conductive metal or metal alloy thin films is provided that includes depositing the metal or metal alloy film on a polycrystalline seed layer that has been deposited directly on a nucleation layer of metal oxide comprising zinc oxide. Also conductive films made by this process are provided. In some embodiments, the metal alloy thin films include silver/gold alloys.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.