Patent · US Active

Field effect control of a microelectromechanical (MEMS) resonator

US9013088B1 · kind B1 · utility

4Cited by

7References

13Claims

0Family size

Assignee

Sand 9, Inc. · US

Inventors

Andrew Sparks · Honolulu, US
Jan H. Kuypers · Cambridge, US
Florian Thalmayr · Unterhaching, DE

Key dates

Filing date	Jul 5, 2012
Grant date	Apr 21, 2015
Priority date	—
Expiry date	Mar 19, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH03H2009/241
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

Apparatus and methods for control of charge in a semiconductor material of a mechanical resonating structure are described. Controlling the charge of the material may control the material properties of the semiconductor, such as the stiffness. Such control may result in changes in the behavior of the mechanical resonating structure, allowing for control and tuning of the behavior of the mechanical resonating structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.