Optical position-measuring device
US9013710B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 3, 2012 |
| Grant date | Apr 21, 2015 |
| Priority date | — |
| Expiry date | Apr 22, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/34715
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical position-measuring device for detecting the relative position of two objects includes a measuring standard connected to one object, and a scanning unit connected to the other object and including a light source, one or more grating(s), and a detector system. The detector system includes a plurality of detector element groups arranged in a detection plane, via which a plurality of position-dependent, phase-shifted scanning signals is able to be generated by scanning a periodic fringe pattern that results in the detection plane, the detector elements that have in-phase scanning signals forming a group in each case. The sum of the areas and the centroid of the detector elements of a group is identical to the sum of the areas and the centroid, respectively, of the detector elements of each other group. Periodic diaphragm structures are arranged in front of the light-sensitive areas of the detector elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.