NEMS comprising AlSi alloy based transducer
US9016125B2 · kind B2 · utility
3Cited by
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13Claims
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Key dates
| Filing date | Jul 13, 2010 |
| Grant date | Apr 28, 2015 |
| Priority date | — |
| Expiry date | May 16, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A nano electro-mechanical system (NEMS) formed on a substrate is provided including at least one fixed part associated with the substrate and at least one movable part in relation to the substrate, the system including a transduction component configured to excite the movable part to confer on it a movement and/or to detect a movement of the movable part, the transduction component including at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, the deposition being supported at least in part by the movable part of the system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.