System and method for transport
US9017480B2 · kind B2 · utility
0Cited by
18References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 28, 2007 |
| Grant date | Apr 28, 2015 |
| Priority date | — |
| Expiry date | Nov 27, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6776
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A deposition system and method includes a deposition source, a roll conveyor and at least one shield positioned at a location proximate to the deposition source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.