Magnetic sensor and method of manufacture thereof
US9018028B2 · kind B2 · utility
1Cited by
3References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 9, 2013 |
| Grant date | Apr 28, 2015 |
| Priority date | — |
| Expiry date | Aug 9, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N59/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A magnetic sensor and a manufacturing method thereof are provided. The magnetic sensor includes: a substrate comprising a plurality of Hall elements, a protective layer formed on the substrate, a base layer formed on the protective layer, and an integrated magnetic concentrator (IMC) formed on the base layer and comprising a surface with an elevated portion. The base layer has a larger cross-sectional area than the IMC.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.