Generation of holes using multiple electrodes

US9018565B2 · kind B2 · utility

Assignee

• Schott AG · DE

Inventors

• Kurt Nattermann · Ockenheim, DE
• Ulrich Peuchert · Bodenheim, DE
• Wolfgang Moehl · Worms, DE
• Stephan Behle · Gau-Odernheim, DE
• Dirk Weidmann · Selzen, DE
• Sabine Lehnicke · Essenheim, DE

Key dates

• Filing date: Jul 4, 2011
• Grant date: Apr 28, 2015
• Expiry date: Sep 26, 2031

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C03C23/00
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

An apparatus for producing holes in dielectric workpieces in the form of thin sheets and substrates, in particular of glass or glass-like materials and semiconductors is provided. The apparatus includes individual high-voltage electrodes that are symmetrically arranged on an electrode holder around the hole to be produced in the workpiece. The apparatus also includes individual counter electrodes that are arranged on a counter electrode holder. The electrodes and counter electrodes can be connected in a permutating manner to a high-voltage source for the discharge of high-voltage flashovers.