Chemical sensing and/or measuring devices and methods
US9018684B2 · kind B2 · utility
0Cited by
8References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 22, 2010 |
| Grant date | Apr 28, 2015 |
| Priority date | — |
| Expiry date | Nov 22, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y15/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods for fabricating silicon nanowire chemical sensing devices, devices thus obtained, and methods for utilizing devices for sensing and measuring chemical concentration of selected species in a fluid are described. Devices may comprise a metal-oxide-semiconductor field-effect transistor (MOSFET) structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.