Display device provided with MEMS light valve and forming method thereof
US9019587B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 28, 2011 |
| Grant date | Apr 28, 2015 |
| Priority date | — |
| Expiry date | Dec 28, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2300/0426
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A display device provided with an MEMS light valve, comprising: a substrate, a fixed grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed grating; a guide is disposed on the substrate. The MEMS light valve comprises: a movable grating, a movable electrode and fixed electrodes; the moveable grating is located in the guide and is electrically connected to the guide when contacting the guide; one end of the movable electrode is fixedly connected with the movable grating, and the other end is suspended; and the fixed electrodes and the movable electrode form a capacitor. When a potential difference forms between the fixed electrodes and the movable electrode, the movable electrode drives the movable grating to move in the guide, thereby opening and closing the fixed grating. Therefore, the MEMS light valve sensitivity can be enhanced and reliability is improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.