Patent · US Active

Surface waveguide having a tapered region and method of forming

US9020317B2 · kind B2 · utility

4Cited by
7References
20Claims
0Family size

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Key dates

Filing dateOct 11, 2013
Grant dateApr 28, 2015
Priority date—
Expiry dateOct 11, 2033

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/14
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A method for forming a waveguide having a thin-core region, a thick-core region, and a transition region of tapered thickness between them is disclosed. The method comprises forming a lower core layer of a first material on a lower cladding, forming a thin central core layer of a second material on the first core layer, forming an upper core layer of the first material on the central core layer, and etching the upper core layer in an etchant such that it is removed from the thin-core region and its thickness monotonically changes from its as-deposited thickness to extinction across the transition region, where the central core layer protects the lower core layer from exposure to the etchant.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.