Probing system for measurement of micro-scale objects
US9021881B2 · kind B2 · utility
1Cited by
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20Claims
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Key dates
| Filing date | Dec 11, 2012 |
| Grant date | May 5, 2015 |
| Priority date | — |
| Expiry date | Dec 11, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N29/265
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for measuring dimensions of a micro-scale object includes a movable stylus, a probe and at least one acoustic emissions sensor. The movable stylus is positionable to contact an object to be measured. The probe is rotatably coupled to the stylus and has a distal end that circumscribes a circle when rotated. The acoustic emissions sensor is operatively coupled to the probe. The sensor is operative to detect acoustic emissions generated from contact between the distal end of the probe and the object, thereby allowing dimensions of the object to be determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.