Manufacturing system and manufacturing method
US9022204B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 22, 2013 |
| Grant date | May 5, 2015 |
| Priority date | — |
| Expiry date | Oct 23, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67715
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A manufacturing system includes a first conveyer apparatus, a second conveyer apparatus and a manufacturing apparatus. The first conveyer apparatus has a first conveyer unit and a first elevator unit. The first elevator unit is adapted to drive the first conveyer unit to move upward or downward between first and second positions. The second conveyer apparatus has a second conveyer unit and a second elevator unit. The second elevator unit is adapted to drive the second conveyer unit to move upward or downward between third and fourth positions. The manufacturing apparatus disposed between the first and second conveyer apparatuses has a manufacturing unit, a third conveyer unit and a fourth conveyer unit. A conveying path of the third conveyer unit passes through the manufacturing unit. The first and third positions are aligned to the third conveyer unit. The second and fourth positions are aligned to the third conveyer unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.