Method for producing a photovoltaic solar cell

US9023682B2 · kind B2 · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Sebastian Mack · Glückstadt, DE
• Ulrich Jager · Glückstadt, DE
• Andreas Wolf · Glückstadt, DE
• Daniel Biro · Glückstadt, DE
• Ralf Preu · Glückstadt, DE
• Gero Kastner · Glückstadt, DE

Key dates

• Filing date: Jun 16, 2011
• Grant date: May 5, 2015
• Expiry date: Jun 16, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P70/50
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A method for producing a photovoltaic solar cell, including the following steps: A. texturizing a front (2) of a semiconductor substrate; B. generating a selective emitter doping on the front (2) of the semiconductor substrate by generating on the front (2) a first low-doped region (4) and a local high-doped region (3) within the first low-doped region; and C. applying at least one metal emitter contact structure to the front (2) of the semiconductor substrate, at least in the regions of local high doping, wherein, between method steps B and C, a respective silicon oxide layer (5a, 5b) is generated in a method step B1 simultaneously on the front and back of the semiconductor substrate via thermal oxidation.