Micromechanical resonator oscillator structure and driving method thereof
US9024708B2 · kind B2 · utility
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11Claims
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Key dates
| Filing date | Sep 14, 2012 |
| Grant date | May 5, 2015 |
| Priority date | — |
| Expiry date | Oct 2, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/2442
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
This invention provides a micromechanical resonator oscillator structure and a driving method thereof. As power handling ability of a resonator is proportional to its equivalent stiffness, a better power handling capability is obtained by driving a micromechanical resonator oscillator at its high equivalent stiffness area. One of the embodiments of this invention is demonstrated by using a beam resonator. A 9.7-MHZ beam resonator via the high-equivalent stiffness area driven method shows better power handling capability and having lower phase noise.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.