Interferometric measurement with crosstalk suppression
US9025158B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 23, 2011 |
| Grant date | May 5, 2015 |
| Priority date | — |
| Expiry date | Jul 5, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/45
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interferometric measurement system suppresses cross talk between optical waveguides used to measure one or more parameters. A first interferometric measurement channel coupled to a first waveguide, and a second interferometric measurement channel coupled to a second waveguide. At least one of the channels includes a reference light path in addition to the first and second waveguides. A reference path optical delay is associated with the reference light path, a first optical delay is associated with the input portion of at least one of the first and second interferometric measurement channels, and a second optical delay is associated with an output portion of the one interferometric measurement channel. A value of the first optical delay and a value the second optical delay are chosen to suppress crosstalk associated with the other of the first and second interferometric measurement channels in the one interferometric measurement channel over a predetermined length of the first waveguide. Signals corresponding to the reference light path and the first and second interferometric measurement channels are processed to measure one or more parameters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.