Apparatus for measuring transmissivity of patterned glass substrate
US9030664B2 · kind B2 · utility
1Cited by
11References
4Claims
0Family size
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Key dates
| Filing date | Dec 22, 2011 |
| Grant date | May 12, 2015 |
| Priority date | — |
| Expiry date | Jan 26, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/59
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for measuring transmissivity of a patterned glass substrate. A beam radiator radiates a laser beam. A collimation lens collimates the laser beam radiated from the laser beam radiator. A beam expander expands a size of the laser beam collimated by the collimation lens. A detector has a light-receiving section, which receives the laser beam that has passed through the patterned glass substrate after having been expanded by the beam expander. A measuring instrument measures a transmissivity of the patterned glass substrate using the laser beam received by the detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.