Patent · US Active

Method and apparatus for alignment optimization with respect to plurality of layers

US9032342B2 · kind B2 · utility

3Cited by

7References

16Claims

0Family size

Assignee

Mycronic AB · SE

Inventors

Mikael Wahlsten · Stockholm, SE
Per Gustafsson · Bjärred, SE

Key dates

Filing date	Feb 28, 2011
Grant date	May 12, 2015
Priority date	—
Expiry date	Nov 12, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH05K3/4679
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method of patterning a plurality of layers of a work piece in a series of writing cycles in one or a plurality of write machines, the workpiece being deviced to have a number of N layers and layers of the workpiece having one or a plurality of boundary condition(s) for pattern position, the method comprising the steps of: determining the boundary conditions of layers 1 to N, calculating deviations due to the boundary conditions and calculating a compensation for the deviation of the first transformation added with the assigned part of the deviation due to the boundary conditions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.