Patent · US Active

Solid precursor sublimator

US9034105B2 · kind B2 · utility

11Cited by

18References

22Claims

0Family size

Assignee

American Air Liquide, Inc. · US

Inventors

Trapti Chaubey · Wilmington, US
Mindi Xu · Naperville, US

Key dates

Filing date	Jan 9, 2009
Grant date	May 19, 2015
Priority date	—
Expiry date	Oct 31, 2033

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/4481
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An apparatus and method for holding a solid precursor in a sublimator such that the solid precursor can be vaporized for saturating a carrier gas. The apparatus may include alternating disks or shelves that form inner and outer passages, as well as spaces between the disks for fluidicly coupling the passages to create a winding, tortuous fluid flow path through the sublimator for optimizing solid vapor saturation. The method may include directing a carrier gas into a sublimation chamber, around the first shelf in the outer passage, over the first shelf in the space, around the second shelf in the inner passage, and back out of the sublimation chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.