Methods of depositing nanomaterial and methods of making a device
US9034669B2 · kind B2 · utility
1Cited by
51References
48Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 6, 2008 |
| Grant date | May 19, 2015 |
| Priority date | — |
| Expiry date | Oct 6, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31504
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Methods for depositing material and nanomaterial onto a substrate are disclosed. Also disclosed are methods of making devices including nanomaterials, and a system useful for depositing materials and nanomaterials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.