Sensor for sensing the presence of at least one fluidum
US9035362B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 4, 2013 |
| Grant date | May 19, 2015 |
| Priority date | — |
| Expiry date | Jun 4, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/4143
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Sensor for sensing the presence of at least one fluidum in a space adjoining the sensor is disclosed. In one aspect, the sensor has a two-dimensional electron gas (2DEG) layer stack, a gate electrode overlaying at least part of the 2DEG layer stack for electrostatically controlling electron density of a 2DEG in the 2DEG layer stack and a source and a drain electrode contacting the 2DEG layer stack for electrically contacting the 2DEG, wherein a detection opening is provided in between the gate electrode and the 2DEG layer stack and wherein the detection opening communicates with the space through a detection opening inlet such that molecules of the fluidum can move from the adjoining space through the detection opening inlet into the detection opening where they can measurably alter a electric characteristic of the 2DEG.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.