Micro electro mechanical systems device
US9035400B2 · kind B2 · utility
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17Claims
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Assignee
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Key dates
| Filing date | Sep 18, 2013 |
| Grant date | May 19, 2015 |
| Priority date | — |
| Expiry date | Sep 18, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed herein is a micro electro mechanical systems (MEMS) device including: a mass body; a first fixed part provided at an outer side of the mass body; and a first flexible part having one end connected to a distal end of the mass body and the other end connected to the first fixed part, wherein the mass body is rotatably connected to the first flexible part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.