Surface features mapping
US9036142B2 · kind B2 · utility
4Cited by
30References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 9, 2013 |
| Grant date | May 19, 2015 |
| Priority date | — |
| Expiry date | May 9, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided herein is an apparatus, including a photon emitting means for emitting photons onto a surface of an article, a photon detecting means for detecting photons scattered from features in the surface of the article; and a mapping means for mapping the features in the surface of the article, wherein the apparatus is configured to process more than one article every 100 seconds.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.