Torsional electrostatic combdrive with increased stiffness
US9036230B1 · kind B1 · utility
11Cited by
13References
20Claims
0Family size
Inventor
Key dates
| Filing date | Dec 24, 2013 |
| Grant date | May 19, 2015 |
| Priority date | — |
| Expiry date | Dec 24, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/105
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A torsional electrostatic combdrive with increased stiffness is disclosed. The torsional electrostatic combdrive includes a movable combteeth group, a stationary combteeth group, and a stationary link group. The stiffness of the torsional electrostatic combdrive is increased by coupling the stationary link group to the stationary combteeth group. Advantageously, the present invention promotes reduced gaps of engaging combteeth, increased snap-in voltage of combteeth, and reduced driving voltage of the combdrive.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.