Systems and methods for providing temperature stability of acousto-optic beam deflectors and acousto-optic modulators during use
US9036247B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 18, 2013 |
| Grant date | May 19, 2015 |
| Priority date | — |
| Expiry date | Oct 18, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2203/21
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention provides a method of laser processing with a thermally stabilized acousto-optic beam deflector. The method includes the steps of: generating a sequence of RF pulses corresponding to a sequence of laser pulses having a laser pulse repetition rate, the RF pulses including transmitting RF pulses at transmitting RF frequencies and non-transmitting RF pulses at non-transmitting RF frequencies for causing the sequence of laser pulses to be deflected in respective transmitting and non-transmitting directions, each RF pulse comprising an RF frequency, an RF amplitude and a duration; controlling each RF pulse such that the sequence of RF pulses provides a modulated RF drive signal that is modulated to provide a balanced thermal loading on the acousto-optic deflector; applying the modulated RF drive signal to the acousto-optic deflector; and deflecting at least one laser pulse with the acousto-optic deflector using the modulated RF drive signal to irradiate a selected target position with a predetermined pulse energy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.