Microfabricated resonant fluid density and viscosity sensor
US9038443B1 · kind B1 · utility
Inventors
Key dates
| Filing date | Dec 8, 2012 |
| Grant date | May 26, 2015 |
| Priority date | — |
| Expiry date | Sep 19, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0426
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Determination of fluid properties is important in a variety of research and industrial applications. Real-time measurements in operating fluidic systems are performed for monitoring, diagnosis, and feedback-control. A simplified, microfabricated resonant sensor for separate density and viscosity measurements of a fluid with a common sensor is disclosed. The sensor is micron-scale, so as to produce a minimum of perturbation to the fluid under test, and may be arrayed to probe viscosity and density across a flowstream or vessel. Measurement is performed at resonance peaks, and geometry or operating conditions of sensor are varied to produce different resonance responses useful for separate sensing of density and viscosity of a fluid. Another embodiment includes a method for reducing quiescent in-plate elastic strain in a plate or membrane so as to allow bending-stiffness dominated behavior of a resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.