Angular velocity sensor
US9038464B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 26, 2013 |
| Grant date | May 26, 2015 |
| Priority date | — |
| Expiry date | Dec 26, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5712
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed herein is an angular velocity sensor including: first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies; a first flexible part connecting the first and second mass bodies to the first frame in a Y axis direction, respectively; a second flexible part connecting the first and second mass bodies to the first frame in an X axis direction, respectively; a second frame provided at an outer side of the first frame; a third flexible part connecting the first and second frames to each other in the X axis direction; and a fourth flexible part connecting the first and second frames to each other in the Y axis direction, wherein the first frame has a thickness in a Z axis direction thinner than that of the second frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.