Highly-reliable micro-electromechanical system temperature sensor
US9039280B2 · kind B2 · utility
3Cited by
4References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2013 |
| Grant date | May 26, 2015 |
| Priority date | — |
| Expiry date | Nov 14, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/48464
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-electromechanical system-type (MEMS) sensor arrangement for wirelessly measuring temperatures is disclosed. The MEMS sensor arrangement includes a multimorph sensor, a sensor coil coupled to the multimorph sensor, and a readout coil configured to be magnetically coupled to the sensor coil to i) energize the sensor coil, and ii) provide a readout of the natural frequency of the multimorph sensor, the sensor coil and the readout coil.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.