Fiber laser systems for cold ablation
US9044829B2 · kind B2 · utility
8Cited by
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17Claims
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Key dates
| Filing date | Nov 9, 2010 |
| Grant date | Jun 2, 2015 |
| Priority date | — |
| Expiry date | Nov 8, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2103/50
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Scribing operations with reduced substrate heating can be provided by applying multiple optical pulses to a substrate within a time interval that is less than a material recombination time. Typically a series of pulses of durations of 5-200 ps with pulse energies of less than about 0.002 mJ can be applied at rates of about 1 MHz to about 30 MHz. Beam area and beam scanning are configured to provide substantial overlap so that material can be removed by cold ablation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.