Multi-analyzer angle spectroscopic ellipsometry
US9046474B2 · kind B2 · utility
1Cited by
10References
18Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 3, 2012 |
| Grant date | Jun 2, 2015 |
| Priority date | — |
| Expiry date | Oct 28, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/214
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Ellipsometry systems and ellipsometry data collection methods with improved stabilities are disclosed. In accordance with the present disclosure, multiple predetermined, discrete analyzer angles are utilized to collect ellipsometry data for a single measurement, and data regression is performed based on the ellipsometry data collected at these predetermined, discrete analyzer angles. Utilizing multiple discrete analyzer angles for a single measurement improves the stability of the ellipsometry system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.