Method for producing a disk resonator gyroscope
US9046541B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 9, 2012 |
| Grant date | Jun 2, 2015 |
| Priority date | — |
| Expiry date | Jun 21, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02496
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method for producing a disk resonator gyroscope includes providing a base substrate and a handle wafer with a release hole, bonding a release wafer to the handle wafer, bonding a resonator wafer to the release wafer, etching the resonator wafer to form a disk resonator with a central pillar, and sense and drive electrodes, selectively applying a conductive film onto the disk resonator on a side of the disk resonator opposite the release wafer, on the outer edge of the disk resonator, and on the surfaces of the sense and drive electrodes facing the outer edge of the disk resonator, bonding the sense and drive electrodes and the central pillar of the disk resonator to the base substrate, and releasing the handle wafer by introducing a dry release agent into the release hole to undercut the release wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.