Patent · US Active

Method for selectively treating surfaces

US9046684B1 · kind B1 · utility

1Cited by

6References

13Claims

0Family size

Assignee

Google LLC · US

Inventors

Casey J. Feinstein · San Jose, US
Matthieu Liger · Pasadena, US
Chia-Jean Wang · Palo Alto, US

Key dates

Filing date	Jul 12, 2012
Grant date	Jun 2, 2015
Priority date	—
Expiry date	Oct 25, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/20
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method of treating a surface includes providing an object and applying a masking layer to a target surface area of the object. A sacrificial material is applied to a non-target surface area of the object. The method also includes removing the masking layer from the target surface area. The target surface area is exposed to a substance that etches or coats the target surface area. The sacrificial material from the non-target surface area of the object is removed, leaving the target surface area of the object etched or coated by the substance while the non-target surface area is not etched or coated by the substance.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.