Electromechanical microswitch for switching an electrical signal, microelectromechanical system, integrated circuit, and method for producing an integrated circuit

US9048052B2 · kind B2 · utility

Assignee

• IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS / LEIBNIZ-INSTITUT FÜR INNOVATIVE MIKROELEKTRONIK · DE

Inventors

• Mehmet Kaynak · Frankfurt, DE
• Mario Birkholz · Frankfurt, DE
• Bernd Tillack · Frankfurt (Oder), DE
• Karl-Ernst Ehwald · Frankfurt, DE
• René Scholz · Bodenwerder, DE

Key dates

• Filing date: Dec 7, 2010
• Grant date: Jun 2, 2015
• Expiry date: Dec 7, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01H1/0036
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

The invention relates to a microelectromechanical system with an electromechanical microswitch for switching an electrical signal in particular a radio frequency signal, in particular in a GHz range, comprising a multi-level conductive path layer stack arranged on a substrate, wherein conductive paths of the multi-level conductive path layer stack arranged in different conductive levels are insulated from one another through electrically insulating layers and electrically connected with one another through via contacts, an electromechanical switch which is integrated in a recess of the multi-level conductive path layer stack and which includes a contact pivot, an opposite contact and at least one drive electrode for the contact pivot, wherein the contact pivot, the opposite contact and the at least one drive electrode respectively form a portion of a conductive level of the multi-level layer stack.