Patent · US Active

Electron beam device with dispersion compensation, and method of operating same

US9048068B2 · kind B2 · utility

1Cited by

10References

16Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

Stefan Lanio · Erding, DE
Gerald Schoenecker · Munich, DE

Key dates

Filing date	May 10, 2010
Grant date	Jun 2, 2015
Priority date	—
Expiry date	Jan 19, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/244
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An electron beam device comprises: a beam emitter for emitting a primary electron beam; an objective electron lens for focusing the primary electron beam onto a specimen, the objective lens defining an optical axis; a beam separator having a first dispersion for separating a signal electron beam from the primary electron beam; and a dispersion compensation element. The dispersion compensation element has a second dispersion, the dispersion compensation element being adapted for adjusting the second dispersion independently of an inclination angle of the primary beam downstream of the dispersion compensation element, such that the second dispersion substantially compensates the first dispersion. The dispersion compensation element is arranged upstream, along the primary electron beam, of the beam separator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.