Resin and resist composition
US9051405B2 · kind B2 · utility
1Cited by
14References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 22, 2010 |
| Grant date | Jun 9, 2015 |
| Priority date | — |
| Expiry date | Jul 25, 2030 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08F226/06
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
A resin containing a structural unit derived from a compound represented by the formula (aa)
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.