Device for measuring the positioning of a microactuator

US9052218B2 · kind B2 · utility

Assignees

• UNIVERSITE DE FRANCHE-COMTE · FR
• CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE · FR
• ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES (ENSMM) · FR
• David Heriban · FR

Inventors

• David Heriban · Besançon, FR
• Joël Agnus · Besançon, FR
• Ronan Noizet · Besançon, FR

Key dates

• Filing date: Jan 17, 2011
• Grant date: Jun 9, 2015
• Expiry date: Jun 30, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01D5/145
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A microtechnique device includes an actuator, designed to move movable equipment with a permanent magnet with respect to a support. The actuator is designed to move the movable equipment in two degrees of freedom from a position of rest, and the permanent magnet is chosen to have a magnetic field distribution that presents a main plane of symmetry and a main direction of magnetization passing through a center. The device includes a first magnetic sensor and a second magnetic sensor, these two being designed to detect a movement of the magnet. The sensors are positioned with respect to the position of rest of the magnet in a specific manner in the main plane of symmetry of the magnetic field and near to extrema. The first and second sensors are then sensitive to the movements of the movable equipment perpendicular to their respective working axes.