Piezoresistive type Z-axis accelerometer
US9052332B2 · kind B2 · utility
6Cited by
4References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 31, 2012 |
| Grant date | Jun 9, 2015 |
| Priority date | — |
| Expiry date | Jan 26, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0837
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pizeoresistive type Z-axis accelerometer is provided, including a substrate; a plurality of anchors formed over the substrate; a plurality of cantilever beams, wherein the cantilever beams include a piezoresistive material; and a proof mass, wherein the proof mass is suspended over the substrate by respectively connecting the proof mass with the anchors, and the accelerometer senses a movement of the proof mass by the piezoresistive material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.