Method and system for quadrature error compensation
US9052335B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 25, 2012 |
| Grant date | Jun 9, 2015 |
| Priority date | — |
| Expiry date | Nov 4, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0242
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed are a MEMS sensor and methods to compensate a quadrature error on the sensor. The sensor detects movements of a substrate, especially accelerations and rotation rates. At least one mass arranged on the substrate and mounted to move relative to it is driven by drive electrodes. The mass executes a movement deviating from the prescribed movement due to a quadrature error. A deflection of the mass occurring due to Coriolis force and quadrature error is detected with detection electrodes. A capacitance change is detected as a function of drive movement of the mass by using compensation electrodes. A compensation charge dependent on the quadrature error of the MEMS sensor is generated on the compensation electrodes. For compensation, the distorted or incorrect charge generated by the quadrature error in the detection electrodes is compensated with the compensation charge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.