Probe with cantilevered beam having solid and hollow sections
US9052342B2 · kind B2 · utility
15Cited by
10References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 30, 2011 |
| Grant date | Jun 9, 2015 |
| Priority date | — |
| Expiry date | Sep 26, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06744
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electrically conductive probe can comprise a post to which a beam structure is attached. The beam structure can comprise a cantilevered portion that extends away from the post to a free end to which a contact structure can be attached. The cantilevered portion of the beam can include both a solid section and a hollow section. Multiple such probes can be used in a test contactor to make electrical connections with an electronic device such as a semiconductor die or dies to be tested.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.