Patent · US Active

Methods and fabrication tools for fabricating optical devices

US9052597B2 · kind B2 · utility

1Cited by

0References

17Claims

0Family size

Assignees

Humboldt-Universität zu Berlin · DE
KARLSRUHER INSTITUT FÜR TECHNOLOGIE · DE

Inventors

Andreas Schell · Stuttgart, DE
Joachim Fischer · Rodgau, DE
Johannes Kaschke · Karlsruhe, DE
Oliver Benson · Berlin, DE
Martin Wegener · Tauberbischofsheim, DE

Key dates

Filing date	Apr 4, 2013
Grant date	Jun 9, 2015
Priority date	—
Expiry date	Jun 18, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/0005
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An embodiment of the present invention relates to a method of fabricating an optical device, the method comprising the steps of:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.